V Congreso Latinoamericano de Ingeniería Biomédica (CLAIB2011)

Fabrication of planar microelectrodes based on bulk silicon micromachining
Calleja Arriaga Wilfrido

Última modificación: 2011-03-26 11:13


The design, fabrication, and basic characterization of planar microelectrodes are reported in this work. Microelectrodes were fabricated using Microelectronics techniques and silicon bulk micromachining. A matrix-like arrangement with 22 electrodes was developed for the purpose of culture cell planned for samples from vagina and urinary organs. Planar electrodes were defined with 40x40 squared-microns area using 200 nanometers-thick of titanium films. The electrode arrangement was distributed in a chip measuring 4x4 millimeters-area. In the central zone of the chip, a two level cavity was bulk-micromachined were the cells/electrodes are to be confined. The complete electrode arrangement was covered using a thin silicon nitride film